Characterization of Integrated Nano Materials

International audience; Depending on the level of the technological developments, the characterization techniques are mature tosupport them or still require protocol definition and relevance demonstration for the issues addressed. For BeyondCMOS and Extreme CMOS devices, the integration of nano-objects like nanowires and carbon nanotubes, brings aboutanalysis requirements that are at the frontier of the state-of-the-art characterization techniques. The specific limitationsof the use of the existing physical and chemical characterization techniques for integrated nanomaterials are highlighted.In the case of Scanning Probe Microscopy, in-situ localization and positioning are specifically challenging and dataanalysis is mainly statistical. It is also shown how specific sample preparation may serve the extraction of the required3D information in particular for Electron Microscopy. The measurement developments related to NEMS technologiesguided by the need for dynamic characterization of these components are covered too.