Back to Search
Start Over
Characterization of Integrated Nano Materials
- Source :
- Frontiers of Characterization and Metrology for Nanoelectronics. AIP, 2009, 2009 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, 2009 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, May 2009, Albany, New York, United States. pp.12-20, ⟨10.1063/1.3251207⟩, ResearcherID
- Publication Year :
- 2009
- Publisher :
- HAL CCSD, 2009.
-
Abstract
- International audience; Depending on the level of the technological developments, the characterization techniques are mature tosupport them or still require protocol definition and relevance demonstration for the issues addressed. For BeyondCMOS and Extreme CMOS devices, the integration of nano-objects like nanowires and carbon nanotubes, brings aboutanalysis requirements that are at the frontier of the state-of-the-art characterization techniques. The specific limitationsof the use of the existing physical and chemical characterization techniques for integrated nanomaterials are highlighted.In the case of Scanning Probe Microscopy, in-situ localization and positioning are specifically challenging and dataanalysis is mainly statistical. It is also shown how specific sample preparation may serve the extraction of the required3D information in particular for Electron Microscopy. The measurement developments related to NEMS technologiesguided by the need for dynamic characterization of these components are covered too.
- Subjects :
- Materials science
Dynamic properties
Nanowire
Nanotechnology
02 engineering and technology
Carbon nanotube
01 natural sciences
law.invention
Scanning probe microscopy
[SPI]Engineering Sciences [physics]
Beyond CMOS
law
0103 physical sciences
[CHIM]Chemical Sciences
Tomography
010302 applied physics
Protocol (science)
Nanoelectromechanical systems
Microscopy
Nanotubes
021001 nanoscience & nanotechnology
Characterization (materials science)
CMOS
3D characterization
0210 nano-technology
PACS: 68.37.-d
81.07.-b
Nanowires NWs
Nanoneedle
Subjects
Details
- Language :
- English
- Database :
- OpenAIRE
- Journal :
- Frontiers of Characterization and Metrology for Nanoelectronics. AIP, 2009, 2009 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, 2009 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, May 2009, Albany, New York, United States. pp.12-20, ⟨10.1063/1.3251207⟩, ResearcherID
- Accession number :
- edsair.doi.dedup.....56834d9add8aebf5479754f426c6258f