1. Strained InGaAs/InAlAs Quantum Wells for Complementary III-V Transistors
- Author
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NAVAL RESEARCH LAB WASHINGTON DC ELECTRONICS SCIENCE AND TECHNOLOGY DIV, Bennett, Brian R, Chick, Theresa F, Boos, J B, Champlain, James G, Podpirka, Adrian A, NAVAL RESEARCH LAB WASHINGTON DC ELECTRONICS SCIENCE AND TECHNOLOGY DIV, Bennett, Brian R, Chick, Theresa F, Boos, J B, Champlain, James G, and Podpirka, Adrian A
- Abstract
Quantum wells of InGaAs clad by InAlAs were grown on AlGaAsSb buffer layers by molecular beam epitaxy. The buffer layer lattice parameters were near 6.0 , yielding tensile strains up to 2% in the InGaAs and InAlAs. Room-temperature electron mobilities of 9000-11,000 cm2/V s were achieved. Field-effect transistors (FETs) were fabricated and exhibited good DC and RF characteristics. Previous work demonstrated compressively-strained GaSb quantum wells on similar buffer layers with high hole mobilities and good transistor performance. Hence, a single buffer layer of AlGaAsSb should be suitable for complementary circuits comprised of n-channel FETs based on the mature InGaAs/InAlAs technology and p-channel FETs based on high-mobility antimonides., Published in the Journal of Crystal Growth, v388 p92 97, 2014.
- Published
- 2014