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Start Over Author "Inui, Y." Journal journal of applied physics
2 results on '"Inui, Y."'

1. Effects of gallium doping on the properties of amorphous-SiC:H films prepared by magnetron cosputtering

Author

Saito, N., Inui, Y., Yamaguchi, T., and Nakaaki, I.

Subjects
Gallium -- Usage, Amorphous semiconductors -- Research, Semiconductor doping -- Research, Physics
Abstract

Research was conducted to study the effects of gallium doping on the structural, electrical, optical and optoelectronic properties of amorphous-SiC:H films. Doping at very low Ga concentrations below Z = 10/3 leads to a reduction of photoconductivity. Results indicate that the n-type conduction of the undoped film confirmed by a thermoelectric power experiment is compensated by the gallium doping.

Published
1998

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