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Effects of gallium doping on the properties of amorphous-Sic: H films prepared by magnetron...
- Source :
-
Journal of Applied Physics . 2/15/1998, Vol. 83 Issue 4, p2067. 5p. 1 Chart, 10 Graphs. - Publication Year :
- 1998
-
Abstract
- Investigates the impurity effects of gallium on properties of a-SiC:H films by use of an experiment. Detailed information on the experiment; Indepth look at the results.
- Subjects :
- *GALLIUM
*PHYSICS experiments
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 83
- Issue :
- 4
- Database :
- Academic Search Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 270003
- Full Text :
- https://doi.org/10.1063/1.366939