1. Exchange-coupled IrMn/CoFe mulitlayers for RF-integrated inductors
- Author
-
Jiang, Ruo-Fan, Shams, Nazmun N., Rahman, M. Tofizur, and Lai, Chih-Huang
- Subjects
Inductors -- Magnetic properties ,Magnetic resonance -- Evaluation ,Frequency response (Electrical engineering) -- Evaluation ,Business ,Electronics ,Electronics and electrical industries - Abstract
The high-frequency characteristics of the RF integrated inductors with antiferromagnetic/ferromagnetic (AF/F) multilayers (MLs) are studied. Each AF layer is 8-nm IrMn and F is [Co.sub.50] [Fe.sub.50] with a 200-nm splitting into N = 1 to 5 repeats of MLs. This exchange coupled {IrMn/CoFe(d nm)}[sub.N] MLs are deposited on top of the two-port inductors with five-turn square spiral coils, a dimension of 100 [micro]m x 100 [micro]m and line/space of 5 [micro]m/2 [micro]m. The inductor surface and magnetic layer is separated by 1-[micro]m-thick Si[O.sub.2]. The enhancement of inductance ([DELTA]L) is 20% compared to an air-core of the same coil size. The resonance peak gradually shifted to a higher frequency with increasing N, and reached at a maximum of 4.3 GHz when N = 5. This is in good agreement with our magnetic data which revealed that the anisotropy field ([H.sub.k]) and ferromagnetic resonance frequency ([f.sub.FMR]) of {IrMn/CoFe(d nm)} [sub.N] MLs are increased with increasing N. The quality factor, Q is improved by 6.8% at 1.5 GHz for the {IrMn/CoFe(40 nm)}[sub.N=5] integrated inductors compared to air-core inductors. Index Terms--Antiferromagnefic (AF), exchange coupling, ferromagnetic resonance (FMR), frequency response, radio-frequency (RF) inductor.
- Published
- 2007