1. GaN nanotip pyramids formed by anisotropic etching.
- Author
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Ng, Hock M., Weimann, Nils G., and Chowdhury, Aref
- Subjects
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GALLIUM nitride , *ANISOTROPY , *SEMICONDUCTORS - Abstract
We experimentally demonstrate the formation of GaN nanotip pyramids by selective and anisotropic etching of N-polar GaN in KOH solution. For samples grown with adjacent Ga- and N-polar regions on the same wafer, the KOH solution was found to selectively etch only the N-polar surface while leaving the Ga-polar surface intact. An aggregation of hexagonal pyramids with well defined {10 &1macr; &1macr;} facets and very sharp tips with diameters less than ∼20 nm were formed. The density of the pyramids can be controlled by varying the KOH concentration, solution temperature or the etch duration. The GaN etching activation energy is estimated to be E[sub a] ≈ 0.587 eV. Dense GaN pyramids with sharp tips have applications in both electronic and photonic devices. [ABSTRACT FROM AUTHOR]
- Published
- 2003
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