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1. Thickness dependence of boron penetration through O2- and N2O-grown gate oxides and its impact on threshold voltage variation

3. Kinetic smoothening: Growth thickness dependence of the interface width of the Si(001)/SiO2 interface.

32. Study of thermally oxidized yttrium films on silicon.

37. Growth temperature dependence of the Si(001)/SiO[sub 2] interface width.

43. Gate quality doped high K films for CMOS beyond 100 nm: 3-10 nm Al/sub 2/O/sub 3/ with low leakage and low interface states

44. Si-doped aluminates for high temperature metal-gate CMOS: Zr-Al-Si-O, a novel gate dielectric for low power applications

48. A symmetric 0.25 μm CMOS technology for low-power, high-performance ASIC applications using 248 nm DUV lithography

49. A Van der Waals plug‐and‐probe approach.

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