Electrical and structural characterization of metal-oxide-semiconductor capacitors with silicon rich oxide

Authors :: Crupi, I.
Lombardo, S.
Spinella, C.
Bongiorno, C.
Liao, Y.
Gerardi, C.
Fazio, B.
Vulpio, M.
Privitera, S.
Source :: Journal of Applied Physics. May 15, 2001, Vol. 89 Issue 10, p5552, 7 p.
Publication Year :: 2001
Abstract: Research describing metal oxide semiconductor capacitors is presented. In particular the electrical characterization of silicon rich oxide thin films at high electric fields are investigated.

Subjects :: Capacitors -- Research
Metal oxide semiconductors -- Research
Physics -- Research
Thin films -- Research
Physics

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