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Evaluating chemical mechanical technology for post-CMP applications

Authors :
Larios, John M. de
Zhang, Jackie
Zhao, Eugene
Source :
Micro. May, 1997, Vol. v15 Issue n5, p61, 6 p.
Publication Year :
1997

Subjects

Subjects :
Logic devices
Cleaning machinery and appliances -- Innovations
Semiconductor production equipment -- Research

Details

ISSN :
10810595
Volume :
v15
Issue :
n5
Database :
Gale General OneFile
Journal :
Micro
Publication Type :
Periodical
Accession number :
edsgcl.21083969

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Authors Abstract Subjects Details