Early history of X-ray lithography at IBM

Authors :: Spiller, Eberhard
Source :: IBM Journal of Research and Development. May, 1993, Vol. v37 Issue n3, p291, 7 p.
Publication Year :: 1993

Subjects :: Research and Development
History of Computing
Circuit Printing
Packaging Density
Chip Packaging
X-Rays
Photolithography
Integrated circuit fabrication
International Business Machines Corp. T.J. Watson Research Center -- Research
Printed circuits -- Research
X-ray lithography -- Research
Integrated circuit fabrication -- Research

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