Early history of X-ray lithography at IBM

MLA

Spiller, Eberhard. “Early History of X-Ray Lithography at IBM.” IBM Journal of Research and Development, vol. v37, no. n3, May 1993, p. 291. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsggo&AN=edsgcl.14191463&authtype=sso&custid=ns315887.

APA

Spiller, E. (1993, May 1). Early history of X-ray lithography at IBM. IBM Journal of Research and Development, v37(n3), 291.

Chicago

Spiller, Eberhard. 1993. “Early History of X-Ray Lithography at IBM.” IBM Journal of Research and Development, May 1. http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsggo&AN=edsgcl.14191463&authtype=sso&custid=ns315887.