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Structural and Electrical Characterization of Hf0.5Zr0.5O2 Thin Films Crystallized by Rapid Thermal Annealing
- Source :
- BIO Web of Conferences, Vol 129, p 24040 (2024)
- Publication Year :
- 2024
- Publisher :
- EDP Sciences, 2024.
Details
- Language :
- English, French
- ISSN :
- 21174458
- Volume :
- 129
- Database :
- Directory of Open Access Journals
- Journal :
- BIO Web of Conferences
- Publication Type :
- Academic Journal
- Accession number :
- edsdoj.7644b0b14c945d99b98fa179440f4a1
- Document Type :
- article
- Full Text :
- https://doi.org/10.1051/bioconf/202412924040