Structural and Electrical Characterization of Hf0.5Zr0.5O2 Thin Films Crystallized by Rapid Thermal Annealing

MLA

Park Jucheol, et al. “Structural and Electrical Characterization of Hf0.5Zr0.5O2 Thin Films Crystallized by Rapid Thermal Annealing.” BIO Web of Conferences, vol. 129, Jan. 2024, p. 24040. EBSCOhost, https://doi.org/10.1051/bioconf/202412924040.

APA

Park Jucheol, Park Yeong Gyeong, Kang Min-Ho, Lee Myung-Keun, & Hyun Moon Seop. (2024). Structural and Electrical Characterization of Hf0.5Zr0.5O2 Thin Films Crystallized by Rapid Thermal Annealing. BIO Web of Conferences, 129, 24040. https://doi.org/10.1051/bioconf/202412924040

Chicago

Park Jucheol, Park Yeong Gyeong, Kang Min-Ho, Lee Myung-Keun, and Hyun Moon Seop. 2024. “Structural and Electrical Characterization of Hf0.5Zr0.5O2 Thin Films Crystallized by Rapid Thermal Annealing.” BIO Web of Conferences 129 (January): 24040. doi:10.1051/bioconf/202412924040.