Etching characteristics of crystal quartz by surface wave microwave induced plasma

Subjects

Subjects :

0209 industrial biotechnology
Materials science
business.industry
02 engineering and technology
01 natural sciences
010309 optics
Crystal
020901 industrial engineering & automation
Surface wave
Etching (microfabrication)
0103 physical sciences
Optoelectronics
Microwave induced plasma
Optical emission spectroscopy
business
Quartz

Details

ISBN :

978-1-5106-3957-7
978-1-5106-3958-4

ISBNs :

9781510639577 and 9781510639584

Database :

OpenAIRE

Journal :

AOPC 2020: Optics Ultra Precision Manufacturing and Testing

Accession number :

edsair.doi.dedup.....5ea84e8fae00981678096d249022df6a

Full Text :

https://doi.org/10.1117/12.2574947