Etching characteristics of crystal quartz by surface wave microwave induced plasma

MLA

Marco Castelli, et al. “Etching Characteristics of Crystal Quartz by Surface Wave Microwave Induced Plasma.” AOPC 2020: Optics Ultra Precision Manufacturing and Testing, Jan. 2020. EBSCOhost, https://doi.org/10.1117/12.2574947.

APA

Marco Castelli, Adam Bennett, Guoda Chen, Fengzhou Fang, & Nan Yu. (2020). Etching characteristics of crystal quartz by surface wave microwave induced plasma. AOPC 2020: Optics Ultra Precision Manufacturing and Testing. https://doi.org/10.1117/12.2574947

Chicago

Marco Castelli, Adam Bennett, Guoda Chen, Fengzhou Fang, and Nan Yu. 2020. “Etching Characteristics of Crystal Quartz by Surface Wave Microwave Induced Plasma.” AOPC 2020: Optics Ultra Precision Manufacturing and Testing, January. doi:10.1117/12.2574947.