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SIMS Depth Profiling of Organic Materials with Ar Cluster Ion Beam

Authors :
Jiro Matsuo
Satoshi Ninomiya
Takaaki Aoki
Kazuya Ichiki
Toshio Seki
Yoshihiko Nakata
Hideaki Yamada
Source :
Transactions of the Materials Research Society of Japan. 35:785-788
Publication Year :
2010
Publisher :
The Materials Research Society of Japan, 2010.

Subjects

Subjects :
Materials science
Ion beam
Analytical chemistry

Details

ISSN :
21881650 and 13823469
Volume :
35
Database :
OpenAIRE
Journal :
Transactions of the Materials Research Society of Japan
Accession number :
edsair.doi...........ec91013bf01ddcf63fe4c4af523b5f78
Full Text :
https://doi.org/10.14723/tmrsj.35.785
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