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Polymer Nano-Composite Micromachining by X-ray Lithography for MEMS Application
- Source :
- 2006 GSW Proceedings.
- Publication Year :
- 2022
- Publisher :
- ASEE Conferences, 2022.
Details
- Database :
- OpenAIRE
- Journal :
- 2006 GSW Proceedings
- Accession number :
- edsair.doi...........dfff2b6d591257efaa7ce99637bdedf7
- Full Text :
- https://doi.org/10.18260/1-2-620-38861