Polymer Nano-Composite Micromachining by X-ray Lithography for MEMS Application

MLA

Yoonyoung Jin, et al. “Polymer Nano-Composite Micromachining by X-Ray Lithography for MEMS Application.” 2006 GSW Proceedings, Mar. 2022. EBSCOhost, https://doi.org/10.18260/1-2-620-38861.

APA

Yoonyoung Jin, Fareed Dawan, Samuel Ibekwe, Jost Goettert, Guoqiang Li, & Eyassu Woldesenbet. (2022). Polymer Nano-Composite Micromachining by X-ray Lithography for MEMS Application. 2006 GSW Proceedings. https://doi.org/10.18260/1-2-620-38861

Chicago

Yoonyoung Jin, Fareed Dawan, Samuel Ibekwe, Jost Goettert, Guoqiang Li, and Eyassu Woldesenbet. 2022. “Polymer Nano-Composite Micromachining by X-Ray Lithography for MEMS Application.” 2006 GSW Proceedings, March. doi:10.18260/1-2-620-38861.