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Analysis of Gaseous Species in Chemical Vapor Deposition of SiC from MTS/H2

Authors :
Lai-Fei Cheng
Chunnian Zhao
Cui-ying Lu
Li-Tong Zhang
Source :
Journal of Inorganic Materials. 25:845-850
Publication Year :
2010
Publisher :
China Science Publishing & Media Ltd., 2010.

Subjects

Subjects :
Inorganic Chemistry
Materials science
Hybrid physical-chemical vapor deposition
Chemical engineering
General Materials Science
Chemical vapor deposition

Details

ISSN :
1000324X
Volume :
25
Database :
OpenAIRE
Journal :
Journal of Inorganic Materials
Accession number :
edsair.doi...........df8abba57fb00811dc81b7095bfa9a29
Full Text :
https://doi.org/10.3724/sp.j.1077.210.00845
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