Analysis of Gaseous Species in Chemical Vapor Deposition of SiC from MTS/H2

MLA

Lai-Fei Cheng, et al. “Analysis of Gaseous Species in Chemical Vapor Deposition of SiC from MTS/H2.” Journal of Inorganic Materials, vol. 25, July 2010, pp. 845–50. EBSCOhost, https://doi.org/10.3724/sp.j.1077.210.00845.

APA

Lai-Fei Cheng, Chunnian Zhao, Cui-ying Lu, & Li-Tong Zhang. (2010). Analysis of Gaseous Species in Chemical Vapor Deposition of SiC from MTS/H2. Journal of Inorganic Materials, 25, 845–850. https://doi.org/10.3724/sp.j.1077.210.00845

Chicago

Lai-Fei Cheng, Chunnian Zhao, Cui-ying Lu, and Li-Tong Zhang. 2010. “Analysis of Gaseous Species in Chemical Vapor Deposition of SiC from MTS/H2.” Journal of Inorganic Materials 25 (July): 845–50. doi:10.3724/sp.j.1077.210.00845.