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High-Crystallinity 30% Scaln Enabling High Figure of Merit X-Band Microacoustic Resonators for Mid-Band 6G
- Source :
- 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS).
- Publication Year :
- 2023
- Publisher :
- IEEE, 2023.
Details
- Database :
- OpenAIRE
- Journal :
- 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
- Accession number :
- edsair.doi...........dd803a74bf725a0b7db86184068a1583
- Full Text :
- https://doi.org/10.1109/mems49605.2023.10052384