High-Crystallinity 30% Scaln Enabling High Figure of Merit X-Band Microacoustic Resonators for Mid-Band 6G

MLA

Gabriel Giribaldi, et al. “High-Crystallinity 30% Scaln Enabling High Figure of Merit X-Band Microacoustic Resonators for Mid-Band 6G.” 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS), Jan. 2023. EBSCOhost, https://doi.org/10.1109/mems49605.2023.10052384.

APA

Gabriel Giribaldi, Pietro Simeoni, Luca Colombo, & Matteo Rinaldi. (2023). High-Crystallinity 30% Scaln Enabling High Figure of Merit X-Band Microacoustic Resonators for Mid-Band 6G. 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS). https://doi.org/10.1109/mems49605.2023.10052384

Chicago

Gabriel Giribaldi, Pietro Simeoni, Luca Colombo, and Matteo Rinaldi. 2023. “High-Crystallinity 30% Scaln Enabling High Figure of Merit X-Band Microacoustic Resonators for Mid-Band 6G.” 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS), January. doi:10.1109/mems49605.2023.10052384.