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Preparation of silicon cross-sectional specimens for TEM observation

Authors :
Martina Giannini
Aldo Armigliato
M. Vanzi
A. Garulli
Source :
Ultramicroscopy. 12:106
Publication Year :
1983
Publisher :
Elsevier BV, 1983.

Subjects

Subjects :
Materials science
Silicon
chemistry
chemistry.chemical_element
Composite material
Instrumentation
Atomic and Molecular Physics, and Optics
Electronic, Optical and Magnetic Materials

Details

ISSN :
03043991
Volume :
12
Database :
OpenAIRE
Journal :
Ultramicroscopy
Accession number :
edsair.doi...........d038c5a6e127236a73ea9e8c0297b1b2
Full Text :
https://doi.org/10.1016/0304-3991(83)90339-x
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