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Low-Temperature Silicon Epitaxy for Atomic Precision Devices
- Source :
- ECS Transactions. 93:37-40
- Publication Year :
- 2019
- Publisher :
- The Electrochemical Society, 2019.
Details
- ISSN :
- 19385862 and 19386737
- Volume :
- 93
- Database :
- OpenAIRE
- Journal :
- ECS Transactions
- Accession number :
- edsair.doi...........c52ca24e64e8bcca47dfae4ee0b3ad73
- Full Text :
- https://doi.org/10.1149/09301.0037ecst