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A study on the Properties of Cu/SiOC(-H)/p-Si(100) and Cu/TaN/SiOC(-H)/p-Si(100) Interface

Authors :
Chang Young Kim
Jong-Kwan Woo
Heang Seuk Lee
Younghun Yu
Chi Kyu Choi
R. Navamathavan
Source :
Journal of the Korean Physical Society. 55:1960-1964
Publication Year :
2009
Publisher :
Korean Physical Society, 2009.

Details

ISSN :
03744884
Volume :
55
Database :
OpenAIRE
Journal :
Journal of the Korean Physical Society
Accession number :
edsair.doi...........b981aabfc667b6a767f169acb2c63101