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A study on the Properties of Cu/SiOC(-H)/p-Si(100) and Cu/TaN/SiOC(-H)/p-Si(100) Interface
- Source :
- Journal of the Korean Physical Society. 55:1960-1964
- Publication Year :
- 2009
- Publisher :
- Korean Physical Society, 2009.
Details
- ISSN :
- 03744884
- Volume :
- 55
- Database :
- OpenAIRE
- Journal :
- Journal of the Korean Physical Society
- Accession number :
- edsair.doi...........b981aabfc667b6a767f169acb2c63101