Study of Nanosecond Laser Annealing on Silicon Doped Hafnium Oxide Film Crystallization and Capacitor Reliability

Authors :: Ali, Tarek Nadi Ismail
Revello Olivo, Ricardo Orlando
Kerdiles, S.
Lehninger, David
Lederer, Maximilian
De, Sourav
Royet, A.-S.
Sünbül, Ayse
Prabhu, Aditya
Kühnel, Kati
Czernohorsky, Malte
Rudolph, Matthias
Hoffmann, Raik
Publication Year :: 2022
Publisher :: Fraunhofer-Gesellschaft, 2022.

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