Very high electron mobility In0.8Ga0.2As heterostructure grown by molecular beam epitaxy

A very high electron mobility pseudomorphic In0.8Ga0.2As heterostructure is successfully grown on InP both by the elimination of the overshoot of flux densities and by the precise control of the flux ratio through a new calibration technique of RHEED oscillations in an MBE system. The critical layer thickness for the pseudomorphic growth of InGaAs on InP is found to follow the energy balance model, and a very high 2DEG mobility of over 1.5 and 16 m2/Vs at 293 and 10 K, respectively, is obtained.