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Improving Performances of Enhancement-Mode AlGaN/GaN MIS-HEMTs on 6-inch Si Substrate Utilizing SiON/Al2O3 Stack Dielectrics
- Source :
- IEEE Electron Device Letters. 41:135-138
- Publication Year :
- 2020
- Publisher :
- Institute of Electrical and Electronics Engineers (IEEE), 2020.
-
Abstract
- Enhancement-mode (E-mode) GaN-based MIS-HEMTs still suffer from undeniable gate leakage or low gate breakdown voltage due to the low quality of gate dielectrics, resulting in a notorious tailing effect of the off-state current. In this letter, a gate scheme featuring SiON/Al2O3 stack dielectrics and partially recessed gate barrier has been employed in the AlGaN/GaN MIS-HEMTs. A high on/off current ratio over $10^{{9}}$ and a small threshold voltage ( ${V} _{\text {th}}$ ) hysteresis less than 20 mV are achieved in the fabricated E-mode devices with a ${V} _{\text {th}}$ around 2.5 V, mainly owing to the reduction of the net positive fixed charge density in the SiON/Al2O3 gate stack confirmed by the ${C}$ - ${V}$ measurements. Meanwhile, a good performance uniformity on 6-inch wafer is achieved which demonstrates the promising scheme for fabricating GaN-based E-mode MIS-HEMT products.
- Subjects :
- 010302 applied physics
Materials science
business.industry
Algan gan
Dielectric
01 natural sciences
Electronic, Optical and Magnetic Materials
Threshold voltage
Si substrate
Logic gate
0103 physical sciences
Breakdown voltage
Optoelectronics
Wafer
Electrical and Electronic Engineering
business
Leakage (electronics)
Subjects
Details
- ISSN :
- 15580563 and 07413106
- Volume :
- 41
- Database :
- OpenAIRE
- Journal :
- IEEE Electron Device Letters
- Accession number :
- edsair.doi...........a598b1d29a8f9baced0ed2629d4e14e2