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Development of electron optical instrument for evaluation of multi emitters: real time observation of operating conditions of multi emitters by LEEM, PEEM and FEEM
- Source :
- Technical Digest of the 17th International Vacuum Nanoelectronics Conference (IEEE Cat. No.04TH8737).
- Publication Year :
- 2004
- Publisher :
- IEEE, 2004.
-
Abstract
- An electron optical instrument for evaluation of emission characteristics of multi emitters is developed to perform the following functions: (1) observation and recording of dynamical behaviors of emission patterns from the whole multi emitter unit as well as each individual working emitter; (2) image observation of geometrical shapes of individual emitters and gates; (3) measurement of emission current stability from the whole multi emitter unit as well as each individual working emitter. A field emitter array type of multi emitter is used as a specimen. The instrument is found to have the capability of real time and simultaneous observation of LEEM and FEEM images as well as PEEM and FEEM images.
Details
- Database :
- OpenAIRE
- Journal :
- Technical Digest of the 17th International Vacuum Nanoelectronics Conference (IEEE Cat. No.04TH8737)
- Accession number :
- edsair.doi...........a333f0c3af240195213ee86a97c9b39e
- Full Text :
- https://doi.org/10.1109/ivnc.2004.1354965