Development of electron optical instrument for evaluation of multi emitters: real time observation of operating conditions of multi emitters by LEEM, PEEM and FEEM

MLA

T. Kimura, et al. “Development of Electron Optical Instrument for Evaluation of Multi Emitters: Real Time Observation of Operating Conditions of Multi Emitters by LEEM, PEEM and FEEM.” Technical Digest of the 17th International Vacuum Nanoelectronics Conference (IEEE Cat. No.04TH8737), Nov. 2004. EBSCOhost, https://doi.org/10.1109/ivnc.2004.1354965.

APA

T. Kimura, A. Mogami, Hidekazu Murata, M. Kudo, Y. Sakai, Hiroshi Shimoyama, K. Inoue, Y. Nishimura, K. Betsui, & M. Kato. (2004). Development of electron optical instrument for evaluation of multi emitters: real time observation of operating conditions of multi emitters by LEEM, PEEM and FEEM. Technical Digest of the 17th International Vacuum Nanoelectronics Conference (IEEE Cat. No.04TH8737). https://doi.org/10.1109/ivnc.2004.1354965

Chicago

T. Kimura, A. Mogami, Hidekazu Murata, M. Kudo, Y. Sakai, Hiroshi Shimoyama, K. Inoue, Y. Nishimura, K. Betsui, and M. Kato. 2004. “Development of Electron Optical Instrument for Evaluation of Multi Emitters: Real Time Observation of Operating Conditions of Multi Emitters by LEEM, PEEM and FEEM.” Technical Digest of the 17th International Vacuum Nanoelectronics Conference (IEEE Cat. No.04TH8737), November. doi:10.1109/ivnc.2004.1354965.