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Dual Lens Electron Holography for High Spatial Resolution Junction and Strain Mapping of Semiconductor Devices
- Source :
- Microscopy and Microanalysis. 20:240-241
- Publication Year :
- 2014
- Publisher :
- Oxford University Press (OUP), 2014.
Details
- ISSN :
- 14358115 and 14319276
- Volume :
- 20
- Database :
- OpenAIRE
- Journal :
- Microscopy and Microanalysis
- Accession number :
- edsair.doi...........9c6ac2bb9b1c19c98ce1516b1c82be00
- Full Text :
- https://doi.org/10.1017/s143192761400292x