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Dual Lens Electron Holography for High Spatial Resolution Junction and Strain Mapping of Semiconductor Devices

Authors :
Y.Y. Wang
J. Bruley
Source :
Microscopy and Microanalysis. 20:240-241
Publication Year :
2014
Publisher :
Oxford University Press (OUP), 2014.

Details

ISSN :
14358115 and 14319276
Volume :
20
Database :
OpenAIRE
Journal :
Microscopy and Microanalysis
Accession number :
edsair.doi...........9c6ac2bb9b1c19c98ce1516b1c82be00
Full Text :
https://doi.org/10.1017/s143192761400292x