Experimental determination of the inelastic mean free path (IMFP) of electrons in Cr, Mo, Ge and Si based on the elastic peak intensity ratio with a Ni reference sample

The inelastic mean free path (IMFP) of electrons has been determined for selected elemental solids using elastic peak electron spectroscopy (EPES) and a Ni standard. The IMFP was evaluated for the range of 500–3000 eV on Cr, Mo, Ge and Si materials. The Ni standard surface has been prepared by electrolysis and HV vapour deposition. Its quality was verified by AES and STM. The theoretical model relating the elastic peak intensity to the value of the IMFP was based on relativistic scattering cross sections and the multiple elastic scattering events were simulated by a Monte Carlo procedure. Reasonable agreement of the obtained IMFP values and their dependence on the energy with the data by Tanuma et al. and by Ashley et al. was found.