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Study of Ge and SiGe nanoparticles formed by RTA and laser pulse annealing of SiGeO amorphous films obtained by RF sputtering

Authors :
Valentin Teodorescu
Source :
Proceedings of the European Microscopy Congress 2020.
Publication Year :
2021
Publisher :
Royal Microscopical Society, 2021.

Subjects

Subjects :
Materials science
Pulse (signal processing)
law
business.industry
Sputtering
Annealing (metallurgy)
Nanoparticle
Optoelectronics
Laser
business
Amorphous solid
law.invention

Details

Database :
OpenAIRE
Journal :
Proceedings of the European Microscopy Congress 2020
Accession number :
edsair.doi...........83fef3a9796c9ee2cf745eed50cdcefb
Full Text :
https://doi.org/10.22443/rms.emc2020.1336
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