Study of Ge and SiGe nanoparticles formed by RTA and laser pulse annealing of SiGeO amorphous films obtained by RF sputtering

MLA

Valentin Teodorescu. “Study of Ge and SiGe Nanoparticles Formed by RTA and Laser Pulse Annealing of SiGeO Amorphous Films Obtained by RF Sputtering.” Proceedings of the European Microscopy Congress 2020, Mar. 2021. EBSCOhost, https://doi.org/10.22443/rms.emc2020.1336.

APA

Valentin Teodorescu. (2021). Study of Ge and SiGe nanoparticles formed by RTA and laser pulse annealing of SiGeO amorphous films obtained by RF sputtering. Proceedings of the European Microscopy Congress 2020. https://doi.org/10.22443/rms.emc2020.1336

Chicago

Valentin Teodorescu. 2021. “Study of Ge and SiGe Nanoparticles Formed by RTA and Laser Pulse Annealing of SiGeO Amorphous Films Obtained by RF Sputtering.” Proceedings of the European Microscopy Congress 2020, March. doi:10.22443/rms.emc2020.1336.