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Advancing high resolution photolithography with hybrid polymers for wafer-scale manufacture of micro-optics and patterned passivation layers
- Source :
- Novel Patterning Technologies 2023.
- Publication Year :
- 2023
- Publisher :
- SPIE, 2023.
Details
- Database :
- OpenAIRE
- Journal :
- Novel Patterning Technologies 2023
- Accession number :
- edsair.doi...........7a34f514d685521236ef8c3b3b00918e
- Full Text :
- https://doi.org/10.1117/12.2658408