Advancing high resolution photolithography with hybrid polymers for wafer-scale manufacture of micro-optics and patterned passivation layers

MLA

Matthias F. Koch, et al. “Advancing High Resolution Photolithography with Hybrid Polymers for Wafer-Scale Manufacture of Micro-Optics and Patterned Passivation Layers.” Novel Patterning Technologies 2023, May 2023. EBSCOhost, https://doi.org/10.1117/12.2658408.

APA

Matthias F. Koch, Maria Russew, Ludwig Scharfenberg, Andreas Benker, Arne Schleunitz, & Gabi Grützner. (2023). Advancing high resolution photolithography with hybrid polymers for wafer-scale manufacture of micro-optics and patterned passivation layers. Novel Patterning Technologies 2023. https://doi.org/10.1117/12.2658408

Chicago

Matthias F. Koch, Maria Russew, Ludwig Scharfenberg, Andreas Benker, Arne Schleunitz, and Gabi Grützner. 2023. “Advancing High Resolution Photolithography with Hybrid Polymers for Wafer-Scale Manufacture of Micro-Optics and Patterned Passivation Layers.” Novel Patterning Technologies 2023, May. doi:10.1117/12.2658408.