In Situ Analysis of Incident Ions on Chamber Surface in Electron Cyclotron Resonance Etching

Authors :: Hiroki Kawada
Hiroyuki Kitsunai
Miyuki Yamane
Manabu Yamashita
Shinichi Suzuki
Nobuo Tsumaki
Source :: SHINKU. 43:812-816
Publication Year :: 2000
Publisher :: The Vacuum Society of Japan, 2000.

Subjects :: Materials science
Etching (microfabrication)
In situ analysis
Analytical chemistry
Electrical and Electronic Engineering
Reactive-ion etching
Atomic physics
Condensed Matter Physics
Ion cyclotron resonance
Electron cyclotron resonance
Surfaces, Coatings and Films
Ion

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