In Situ Analysis of Incident Ions on Chamber Surface in Electron Cyclotron Resonance Etching

MLA

Hiroki Kawada, et al. “In Situ Analysis of Incident Ions on Chamber Surface in Electron Cyclotron Resonance Etching.” SHINKU, vol. 43, Jan. 2000, pp. 812–16. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.doi...........78de2c466745b33c3daecac257360f8a&authtype=sso&custid=ns315887.

APA

Hiroki Kawada, Hiroyuki Kitsunai, Miyuki Yamane, Manabu Yamashita, Shinichi Suzuki, & Nobuo Tsumaki. (2000). In Situ Analysis of Incident Ions on Chamber Surface in Electron Cyclotron Resonance Etching. SHINKU, 43, 812–816.

Chicago

Hiroki Kawada, Hiroyuki Kitsunai, Miyuki Yamane, Manabu Yamashita, Shinichi Suzuki, and Nobuo Tsumaki. 2000. “In Situ Analysis of Incident Ions on Chamber Surface in Electron Cyclotron Resonance Etching.” SHINKU 43 (January): 812–16. http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.doi...........78de2c466745b33c3daecac257360f8a&authtype=sso&custid=ns315887.