In-Situ Low Energy Ion Milling with a FIB-SEM for TEM lift-out Sample Preparation of Copper Damascene Structures Fabricated with Low k porous SiLKTM Semiconductor Dielectric

Subjects

Subjects :

In situ
Materials science
business.industry
Nanotechnology
Dielectric
Copper damascene
Lift (force)
Semiconductor
Sample preparation
Composite material
Ion milling machine
Porosity
business
Instrumentation

Details

ISSN :

14358115 and 14319276

Volume :

9

Database :

OpenAIRE

Journal :

Microscopy and Microanalysis

Accession number :

edsair.doi...........2e3e98e3856bc4eb4e25d2322535a6fe

Full Text :

https://doi.org/10.1017/s1431927603444371