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A reference-scan-based method for correcting the nonlinear drift of atomic force microscopy at sub-nanometer precision

Authors :
Ryosuke Kizu
Satoshi Gonda
Akiko Hirai
Ichiko Misumi
Source :
Measurement Science and Technology. 31:054009
Publication Year :
2020
Publisher :
IOP Publishing, 2020.

Subjects

Subjects :
Nonlinear system
Materials science
Optics
business.industry
Atomic force microscopy
Applied Mathematics
Nanometre
business
Instrumentation
Engineering (miscellaneous)

Details

ISSN :
13616501 and 09570233
Volume :
31
Database :
OpenAIRE
Journal :
Measurement Science and Technology
Accession number :
edsair.doi...........2c6d79a13e62d5abfc37c91fd17e4d3a
Full Text :
https://doi.org/10.1088/1361-6501/ab6b50
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