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3D Monolithic Integration of ScAlN-based GHz MEMS Acoustic Filters on 200mm RFSOI Wafer

Authors :
Y. Zhang
X. Wang
C. Liu
E. Y. Z. Woo
W. Yang
Q. Zhang
H. Lin
D. Yan
R. M. Kumarasamy
B. Chen
N. Wang
Y. Zhu
Source :
2022 International Electron Devices Meeting (IEDM).
Publication Year :
2022
Publisher :
IEEE, 2022.

Details

Database :
OpenAIRE
Journal :
2022 International Electron Devices Meeting (IEDM)
Accession number :
edsair.doi...........0f45fa3af27a035d7bf1eeea0adebfc1
Full Text :
https://doi.org/10.1109/iedm45625.2022.10019557
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