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Optical and structural properties of silicon nitride thin films deposited by plasma enhanced chemical vapor deposition for high reflectance optical mirrors
- Source :
- Proceedings of SPIE; June 2024, Vol. 13020 Issue: 1 p130200T-130200T-12, 12889813p
- Publication Year :
- 2024
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 13020
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs66982640
- Full Text :
- https://doi.org/10.1117/12.3022947