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Ultra-high throughput electron beam lithography for wafer size nanoimprint mold fabrication
- Source :
- Proceedings of SPIE; September 2023, Vol. 12915 Issue: 1 p1291507-1291507-6
- Publication Year :
- 2023
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 12915
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs66439935
- Full Text :
- https://doi.org/10.1117/12.2684952