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Single exposure EUV patterning of BEOL metal layers on the IMEC iN7 platform
- Source :
- Proceedings of SPIE; April 2017, Vol. 10143 Issue: 1 p1014318-1014318-10
- Publication Year :
- 2017
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 10143
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs42167227
- Full Text :
- https://doi.org/10.1117/12.2258005