Single exposure EUV patterning of BEOL metal layers on the IMEC iN7 platform

MLA

Panning, Eric M., et al. “Single Exposure EUV Patterning of BEOL Metal Layers on the IMEC IN7 Platform.” Proceedings of SPIE, vol. 10143, no. 1, Apr. 2017, pp. 1014318-1014318–10. EBSCOhost, https://doi.org/10.1117/12.2258005.

APA

Panning, E. M., Goldberg, K. A., Blanco Carballo, V. M., Bekaert, J., Mao, M., Kutrzeba Kotowska, B., Larivière, S., Ciofi, I., Baert, R., Kim, R. H., Gallagher, E., Hendrickx, E., Tan, L. E., Gillijns, W., Trivkovic, D., Leray, P., Halder, S., Gallagher, M., Lazzarino, F., … Wittebrood, F. (2017). Single exposure EUV patterning of BEOL metal layers on the IMEC iN7 platform. Proceedings of SPIE, 10143(1), 1014318-1014318–10. https://doi.org/10.1117/12.2258005

Chicago

Panning, Eric M., Kenneth A. Goldberg, V. M. Blanco Carballo, J. Bekaert, M. Mao, B. Kutrzeba Kotowska, S. Larivière, et al. 2017. “Single Exposure EUV Patterning of BEOL Metal Layers on the IMEC IN7 Platform.” Proceedings of SPIE 10143 (1): 1014318-1014318–10. doi:10.1117/12.2258005.