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Low resistivity ITO film prepared using the ultra high density ITO target
- Source :
- Thin Solid Films; 1998, Vol. 334 Issue: 1 p30-34, 5p
- Publication Year :
- 1998
Details
- Language :
- English
- ISSN :
- 00406090
- Volume :
- 334
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Thin Solid Films
- Publication Type :
- Periodical
- Accession number :
- ejs2746398
- Full Text :
- https://doi.org/10.1016/S0040-6090(98)01111-0