Low resistivity ITO film prepared using the ultra high density ITO target

MLA

Utsumi, K., et al. “Low Resistivity ITO Film Prepared Using the Ultra High Density ITO Target.” Thin Solid Films, vol. 334, no. 1, Jan. 1998, pp. 30–34. EBSCOhost, https://doi.org/10.1016/S0040-6090(98)01111-0.

APA

Utsumi, K., Matsunaga, O., & Takahata, T. (1998). Low resistivity ITO film prepared using the ultra high density ITO target. Thin Solid Films, 334(1), 30–34. https://doi.org/10.1016/S0040-6090(98)01111-0

Chicago

Utsumi, K., O. Matsunaga, and T. Takahata. 1998. “Low Resistivity ITO Film Prepared Using the Ultra High Density ITO Target.” Thin Solid Films 334 (1): 30–34. doi:10.1016/S0040-6090(98)01111-0.