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Fabrication of Fresnel zone plates by ion-beam lithography and application as objective lenses in extreme ultraviolet microscopy at 13 nm wavelength.
- Source :
- Optics Letters; 12/15/2012, Vol. 37 Issue 24, p5100-5102, 3p
- Publication Year :
- 2012
Details
- Language :
- English
- ISSN :
- 01469592
- Volume :
- 37
- Issue :
- 24
- Database :
- Supplemental Index
- Journal :
- Optics Letters
- Publication Type :
- Academic Journal
- Accession number :
- 94265587
- Full Text :
- https://doi.org/10.1364/OL.37.005100