Fabrication of Fresnel zone plates by ion-beam lithography and application as objective lenses in extreme ultraviolet microscopy at 13 nm wavelength.

MLA

Overbuschmann, Johannes, et al. “Fabrication of Fresnel Zone Plates by Ion-Beam Lithography and Application as Objective Lenses in Extreme Ultraviolet Microscopy at 13 Nm Wavelength.” Optics Letters, vol. 37, no. 24, Dec. 2012, pp. 5100–02. EBSCOhost, https://doi.org/10.1364/OL.37.005100.

APA

Overbuschmann, J., Hengster, J., Irsen, S., & Wilhein, T. (2012). Fabrication of Fresnel zone plates by ion-beam lithography and application as objective lenses in extreme ultraviolet microscopy at 13 nm wavelength. Optics Letters, 37(24), 5100–5102. https://doi.org/10.1364/OL.37.005100

Chicago

Overbuschmann, Johannes, Julia Hengster, Stephan Irsen, and Thomas Wilhein. 2012. “Fabrication of Fresnel Zone Plates by Ion-Beam Lithography and Application as Objective Lenses in Extreme Ultraviolet Microscopy at 13 Nm Wavelength.” Optics Letters 37 (24): 5100–5102. doi:10.1364/OL.37.005100.