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Low-Temperature Dechlorosilylation Chemistry for Area-Selective Deposition of Ge2Sb2Te5 and Its Mechanism in Nanopatterns.

Authors :
Sinha, Jyoti
Gallis, Leonidas
Clerix, Jan-Willem J.
van der Veen, Marleen
Innocent, Jerome
Illiberi, Andrea
Givens, Michael
Nyns, Laura
Delabie, Annelies
Source :
Chemistry of Materials; 6/25/2024, Vol. 36 Issue 12, p5943-5952, 10p
Publication Year :
2024

Details

Language :
English
ISSN :
08974756
Volume :
36
Issue :
12
Database :
Supplemental Index
Journal :
Chemistry of Materials
Publication Type :
Academic Journal
Accession number :
178089131
Full Text :
https://doi.org/10.1021/acs.chemmater.4c00286