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Low-Temperature Dechlorosilylation Chemistry for Area-Selective Deposition of Ge2Sb2Te5 and Its Mechanism in Nanopatterns.
- Source :
- Chemistry of Materials; 6/25/2024, Vol. 36 Issue 12, p5943-5952, 10p
- Publication Year :
- 2024
Details
- Language :
- English
- ISSN :
- 08974756
- Volume :
- 36
- Issue :
- 12
- Database :
- Supplemental Index
- Journal :
- Chemistry of Materials
- Publication Type :
- Academic Journal
- Accession number :
- 178089131
- Full Text :
- https://doi.org/10.1021/acs.chemmater.4c00286